| 1. | 3 . put forward the phase scanning method for vls grating and design the scanning device correspondingly
3 、提出了相位扫描的方法，设计并制作了相应的相位扫描装置。 |
| 2. | It is very important for mechanism - phase scanning phased array radar to effective distribute energy and time in elevation
摘要仰角扫描能量有效分配对机相扫体制相控阵雷达的设计十分重要。 |
| 3. | 4 . make the ruling experiments for vls grating using the phase scanning method . analyze the ruling error primarily
4 、采用相位扫描方法进行了变栅距光栅的刻划实验，并对刻划误差进行了初步的分析。 |
| 4. | The experiments show that the phase scanning method is right and innovative and the ability of the sub - nanometer space increment is reached . since it only require an extra phase scanning device , the whole system has higher reliability and practicability
由于该方法只需在现有的光电式光栅刻划机上附加相位扫描装置，因而系统的整体可靠性更高、更实用。 |
| 5. | Since the space increment within nanometer or sub - nanometer is required , it is difficult to make it only by improving the precision of the graduation system . a phase scanning method for fabricating the vls grating is suggested initially in this dissertation
实验结果表明，本文捉出的相位扫描方法原理正确，具有创新性，达到了变栅距光栅所要求的亚纳米级的栅距变化精度。 |
